The Saturn series utilizes laser confocal spiral scanning imaging technology, integrating brightfield, darkfield, topography, phase, and multiple PL detection channels. This enables comprehensive and accurate inspection of particles and defects on polished substrates and epitaxial wafers. Furthermore, the Saturn series features automatic real-time focus, effectively overcoming imaging defocus issues caused by wafer warpage and ensuring accurate and reliable inspection results. This product will provide strong support for semiconductor material quality control and process optimization.
