Mars series microscopic imaging compound non-patterned wafer defect inspection equipment
Product description:
The Mars series is a high-speed, fully automated defect inspection system for polished substrates and epitaxial wafers. Using differential interference contrast, photoluminescence, and dark-field scattering, the system features automatic real-time focus and multi-channel data acquisition, offering advantages such as low noise and high-resolution imaging. Utilizing a deep learning-based automatic defect detection algorithm, the system enables parallel processing of wafer inspection and data analysis, meeting the needs of production inspection and device yield improvement for 4-, 6-, 8-, and 12-inch wafers, as well as non-standard sizes.
